コリメーターを用いて作製したFe_<16>N_2スパッタ薄膜の構造と飽和磁化  [in Japanese] Structure and Saturation Magnetization of Fe_<16>N_2 Sputtered Film Fabricated by Using a Collimator  [in Japanese]

Fe_<16>N_2 films were fabricated on MgO{100}substrates by using a collimator. Structural analysis and magnetic measurement were carried out. The results can be summarized as follows: (1) for α'-Fe-N films prepared by using a collimator with θ=60°, an improvement in the degree of the preferred grain orientation and an increase in the grain diameter were observed; (2) improvement in the continuity of the c-axis direction was not realized for an α"-Fe_<16>N_2 phase prepared by using a collimator, even though improvement was observed for an α' phase in an as-deposited state; and (3) there is no relationship between σ_s and the continuity of the c-axis direction for α' and α" phases.