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Abstract
Barium ferrite (BaM) thin films were prepared by facing-targets sputtering with several kinds of target compositions and their magnetic and crystallographic properties were studied. It was found that the temperature of BaM films to be crystallized with a stoichiometric target composition (i. e. Fe_2/Ba=6) was around 500℃, and that of those with target compositions of 5.5 and 5 was around 525 and 550 ℃, respectively.
Journal
- Journal of Magnetics Society of Japan [List of Volumes]
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Journal of Magnetics Society of Japan 23(4-2), 1217-1220, 1999-04-15 [Table of Contents]
The Magnetics Society of Japan (MSJ)