高磁歪薄膜歪センサを用いた圧電アクチュエータの線型駆動  [in Japanese] Linear Drive of Piezoelectric Actuator with Highly Magnetostrictive Film Strain Sensor  [in Japanese]

This paper presents a study of the linear compensation of nonlinear hysteric piezoelectric actuators in which highly magnetostrictive film patterns was used as a strain sensor. The elements have a hybrid structure, in which thin soft glass substrates with highly magnetostrictive amorphous FeCoSiB film were bonded onto a PTZ piezoelectric substrates. The magnetostrictive film as a strain sensor detects the deflection of the actuator, and a voltage signal from the magnetostrictive strain sensor related to a deflection of the actuator is used for linear control of the acturator.