書誌事項
- タイトル別名
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- Fabrication and Characterization of Cantilevers for a Scanning Magnetoresistance Microscope
- ソウサガタ ジキ テイコウ コウカ ケンビキョウヨウ カンチレバー ノ サクセイ ト ヒョウカ
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A variety of techniques have been provided to obtain quantitative measurement of the surface magnetic properties of materials with high spatial resolution Scanning magnetoresistance microscopy (SMRM) is a scanning probe technique in which a magnetoresistive (MR) sensor is used as a magnetic probe. It allows direct imaging of the magnetic flux in the sample. In previous work on SMRM, no feed-back system has been used to control the sample-sensor distance. Therefore, it was impossible to obtain topographic information on the sample. We made a cantilever with a MR sensor by means of photolithography, electron beam lithography, and micromachining. By using the feedback system of atomic force microscope, simultaneous measurement of the magnetic field and surface topography was realized.
収録刊行物
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- 日本応用磁気学会誌
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日本応用磁気学会誌 25 (4_2), 1079-1082, 2001
公益社団法人 日本磁気学会
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詳細情報 詳細情報について
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- CRID
- 1390001205091450496
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- NII論文ID
- 110002811138
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- NII書誌ID
- AN0031390X
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- COI
- 1:CAS:528:DC%2BD3MXkvVWjtLk%3D
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- ISSN
- 18804004
- 02850192
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- NDL書誌ID
- 5759231
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- NDL-Digital
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可