Sensitive Strain Gauge Using a CMOS IC Combined with an Amorphous Magnetostrictive Wire Cantilever Beam

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  • アモルファス磁歪ワイヤ片持ちバリとCMOS ICによる高感度ひずみゲージ
  • アモルファス ジワイ ワイヤ カタモチ バリ ト CMOS IC ニヨル コウ

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Abstract

A highly sensitive linear strain gauge using a pair of amorphous CoSiB wires fixed to a plastic cantilever beam combined with a CMOS IC multivibrator circuit is presented. The wires are magnetized with a sharp pulse current to generate the stress impedance (SI) effect, showing a gauge factor of about 2000 in the CMOS IC circuit The linear strain gauge shows a resolution of about 2.5 mg for weight detection with high linearity in the range of −0.75∼1.25 g. The mechanism of the SI characteristics in the CoSiB wire is analyzed using a magnetization rotation model. Pulsation of fingertip blood vessels was stably detected by using the SI gauge stress sensor.

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