金属-チタン酸化物によるガス状水素化物の検出(<特集>センサー)

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タイトル別名
  • Detection of gaseous hydrides by metal-titanium oxide gas sensors.
  • 金属‐チタン酸化物によるガス状水素化物の検出
  • キンゾク チタン サンカブツ ニ ヨル ガスジョウ スイソカブツ ノ ケンシュ

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抄録

Small and inexpensive gas sensors were developed for detection of gaseous hydrides (arsine, phosphine etc.) or hydrogen, which are often used in semiconductor manufacturing processes. These sensors consisting of a temperature controller and a gas sensor are made by thin film technology on silicon wafers. They consists of a metal layer (gold or palladium of 20 nm thickness) and titanium oxide prepared by the oxidation of titanium film deposited by the sputtering method. The responses of these sensors are measured by standard canistor gas dilution using mass flow controllers. The optimun operation temperatures are 150200°C. The gold-titanium oxide is highly sensitive to toxic gases (arsine, phsophine etc.) and the palladium-titanium oxide is sensitive for hydrogen gas. These sensors are hardly effected by the other gases. For example, the sensitivity of gold-titanium oxide to ethanol is 1/100000 times that to phosphine. The life time of the sensors is increased by using high temperatures and a glass fiber protection filter.

収録刊行物

  • 分析化学

    分析化学 39 (11), 611-615, 1990

    公益社団法人 日本分析化学会

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