電磁レンズを用いたＸ線光電子分光装置の高分子材料に対する電荷中和条件の検討とその応用

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タイトル別名
  • Study of the charge neutralization for organic polymers and the applications by an X-ray photoelectron spectrometer equipped with a magnetic immersion lens.
  • デンジ レンズ オ モチイタ Xセン コウデンシ ブンコウ ソウチ ノ コウブ

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Recently, X-ray photoelectron spectrometers equipped with a magnetic immersion lens have been widely used. Low-energy electrons ejected from a filament are guided to the sample surface by a magnetic field and bias voltage for neutralization. This charge neutralization method was investigated using a smooth surface of polyethylene and polypropylene as a sample, and using beads of polypropylene with X-rays of Mg Kα source and monochromatized Al Kα source. The charge shift with a monochromatized source was extremely large compared to that of Mg Kα source. The optimum bias voltage was found to be -4.0V to -4.5V. Although the "differential charging" phenomenon was observed in the analysis of polypropylene beads, it was compensated by a bias of -4.0V. Thus, the dependences of the optimum bias voltage on the magnitude of the charging and form of the sample are small in the neutralization method. This neutralization method was applied to an analysis of polyethylene and polypropylene, photo-resist film and polymer alloy. Polyethylene and polypropylene were distinguished from each other by mapping using valence-band spectra. The high-resolution spectrum of C1s was obtained from a photo-resist film of 150μm square on a silicon substrate. Mapping of the small particles of polypropylene which were dispersed in rubber was successfully achieved.

収録刊行物

  • 分析化学

    分析化学 44 (11), 943-951, 1995

    公益社団法人 日本分析化学会

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