@article{YANOFumiko:2004-01-29,
author="YANO, Fumiko and YANAGITA, Hiroshi and MIZUNO, Takayuki and ARAKAWA, Fumiko and OGAWA, Yoshifumi and TERADA, Shohei and ASAYAMA, Kyouichiro",
title="Development of Failure Analysis Method Using Nano-prober and THIS",
journal="IEICE technical report. Component parts and materials",
ISSN="09135685",
publisher="The Institute of Electronics, Information and Communication Engineers",
year="2004",
month="jan",
volume="103",
number="645",
pages="13-15",
URL="http://ci.nii.ac.jp/naid/110003175082/en/",
DOI="",
}