1200 Dots-Per-lnch Light Emitting Diode Array Fabricated by Solid-Phase Zinc Diffusion

• OGIHARA Mitsuhiko

  the Microsystems Technology Laboratory, Oki Electric Industry, Co.,Ltd.,

• SHIMIZU Takatoku

  the Microsystems Technology Laboratory, Oki Electric Industry, Co.,Ltd.,

• TANINAKA Masumi

  the Microsystems Technology Laboratory, Oki Electric Industry, Co.,Ltd.,

• NAKAMURA Yukio

  the Microsystems Technology Laboratory, Oki Electric Industry, Co.,Ltd.,

• ABIKO Ichimatsu

  the Microsystems Technology Laboratory, Oki Electric Industry, Co.,Ltd.,

抄録

We developed a 1200 dots-per-inch light emitting diode array (1200 dpi LED array) chip using a GaAs_lt0.8gt P_lt0.2gt epitaxial substrate for the first time. One LED array chip consists of 256 LEDs. In general, LED arrays are fabricated by vapor-phase zinc diffusion. From the viewpoint that shallow junctions should be formed to fabricate a very high-density LED array, solid-phase diffusion seems to be more suitable. We fabricated the LED array using selectively-masked solid-phase zinc diffusion, and the diffusion depth was controlled at 1μm. The diffusion depth was uniform under the diffusion window. The ratio of the length of lateral diffusion to the diffusion depth was about 1.7. These features imply that Zn diffusion was well controlled. In the Zn diffusion, the carrier concentration in the Zn diffusion region was high enough and the sheet resistance of the diffusion region with a diffusion depth of 1μm was low enough to obtain a sufficient level of emitted light power. The results of performance tests showed that the characteristics of the LED array chip are satisfactory for application in optical printer print heads, because of the array's highly-resolved near-field pattern characteristic, ample emitted light power, low emitted-light-power deviation, and long life.

収録刊行物

• IEICE transactions on electronics

  IEICE transactions on electronics 80 (3), 489-497, 1997-03-25

  一般社団法人電子情報通信学会

キーワード

• 1200 dpi LED array
• solid-phase Zn diffusion
• GaAs_<0.8>P_<0.2>
• diffusion depth
• emitted light power
• optical printer print head

詳細情報

• CRID: 1573105977301654400
• NII論文ID: 110003211227
• NII書誌ID: AA10826283
• ISSN: 09168524
• 本文言語コード: en
• データソース種別:
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