A New Ceramic Emitter Applicable to a Cleanroom (Special Issue on LSI Memories)

Abstract

We deal with a new type ceramic emitter which is used in a cleanroom ionizer system and is composed of a needle-shaped silicon and a rod-shaped silicon carbide ceramics. The discharge test was carried out to investigate the particle generation from the emitter and the degradation of the emitter. As a result, it was found that the ceramic emitter had practically higher performance than a conventional tungsten emitter.

Journal

IEICE transactions on electronics   [List of Volumes]

IEICE transactions on electronics E76-C(11), 1670-1672, 1993-11-25  [Table of Contents]

The Institute of Electronics, Information and Communication Engineers

Cited by:  3

You must have a user ID to see the cited references.If you already have a user ID, please click "Login" to access the info.New users can click "Sign Up" to register for an user ID.

Preview

Preview

Codes

  • NII Article ID (NAID) :
    110003220073
  • NII NACSIS-CAT ID (NCID) :
    AA10826283
  • Text Lang :
    ENG
  • Article Type :
    Journal Article
  • ISSN :
    09168524
  • Databases :
    CJPref  NII-ELS 

Share