C-13-6 Ablation of Polyimide Interface Film by the Transmitting Electron Beam

• Phatak Girish

  Department of Electrical, Electronics and Information Engineering, Nagoya University

• Ogawa Shinji

  Department of Electrical, Electronics and Information Engineering, Nagoya University

• Suzuki Mikinori

  Department of Electrical, Electronics and Information Engineering, Nagoya University

• Morita Shinzo

  Department of Electrical, Electronics and Information Engineering, Nagoya University

収録刊行物

• 電子情報通信学会総合大会講演論文集

  電子情報通信学会総合大会講演論文集 1999 (2), 188-, 1999-03-08

  一般社団法人電子情報通信学会

詳細情報

• CRID: 1573105977178950016
• NII論文ID: 110003254846
• NII書誌ID: AN10471452
• 本文言語コード: en
• データソース種別:
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