Laser diode integrated with polyimide waveguide

• HIGURASHI Eiji

  NTT Opto-electronics Laboratories

• TSUBAMOTO Mieko

  NTT Advanced Technology

• SAWADA Renshi

  NTT Opto-electronics Laboratories

Bibliographic Information

Other Title

• ポリイミド導波路付半導体レーザ

Abstract

We developed a laser diode (LD) integrated with a polyimide waveguide on the same GaAs substrate to control (divide or collimate) the emitted light beam To divide the beam from the LD we fabricated a groove to act as a half-mirror in the polyimide waveguide. When the incident angle to the groove surface was a little below the critical angle at a suitable groove width, we obtained the half mirror effect. Additionally, to collimate the beam in the horizontal direction inside the polyimide waveguide we fabricated a parabolic-shaped total internal reflection mirror in the polyimide waveguide. The far field pattern (FFP) was measured to be 1.8°.

Journal

• IEICE technical report. EMD

  IEICE technical report. EMD 98 (249), 85-89, 1998-08-27

  The Institute of Electronics, Information and Communication Engineers

Keywords

• laser diode
• polyimide
• half-mirror
• collimator
• micro-sensor

Details

• CRID: 1573668927130321280
• NII Article ID: 110003293529
• NII Book ID: AN10383978
• Text Lang: ja
• Data Source:
  • CiNii Articles