新型混合双光束激光退火法的模〓分析 NUMERICAL SIMULATION ON A NOVEL MIXED DUAL BEAM LASER CRYSTALLIZATION METHOD

Abstract

We propose a novel mixed dual beam laser crystallization method, where two different pulse lasers with different wavelength successively irradiate on Si film. Thermodynamic computer model of laser annealing is used to analyze the solidification characteristics of Si film annealed by the novel method. The simulation results demonstrate that the novel method is a promising one to reduce solidification velocity effectively.

Journal

ITE Technical Report   [List of Volumes]

ITE Technical Report 21(10), 85-87, 1997-02-13  [Table of Contents]

The Institute of Image Information and Television Engineers

References:  4

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Codes

  • NII Article ID (NAID) :
    110003690386
  • NII NACSIS-CAT ID (NCID) :
    AN1059086X
  • Text Lang :
    ENG
  • Article Type :
    ART
  • ISSN :
    13426893
  • Databases :
    CJP  NII-ELS