Molecular Spectroscopy Techniques Applied for Processing Plasma Diagnostics (小特集 プラズマにおける分子分光計測の手法と実際) Molecular Spectroscopy Techniques Applied for Processing Plasma Diagnostics

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Abstract

Optical diagnostics are between the most commonly used tools for the characterization of plasmas and for the better understanding of physical and chemical processes controlling their time and space dependencies. In this review paper the most popular spectroscopy techniques are described and examples of their applications to plasmas are indicated. An special emphasis is given to power saturation phenomena, encountered in laser based diagnostics. Numerical applications show that with commonly available lasers a great care must be taken to avoid saturation and to be really non-intrusive, as expected for a diagnostic tool.

Journal

  • Kakuyūgō kenkyū

    Kakuyūgō kenkyū 80(9), 767-776, 2004-09-25

    The Japan Society of Plasma Science and Nuclear Fusion Research

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  • Measurements of atomic carbon density in processing plasmas by vacuum ultraviolet laser absorption spectroscopy

    Tanaka N , Tachibana K

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Codes

  • NII Article ID (NAID)
    110003827736
  • NII NACSIS-CAT ID (NCID)
    AN10401672
  • Text Lang
    ENG
  • Article Type
    REV
  • ISSN
    09187928
  • NDL Article ID
    7102130
  • NDL Source Classification
    ZM35(科学技術--物理学)
  • NDL Call No.
    Z15-8
  • Data Source
    CJP  NDL  NII-ELS  J-STAGE 
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