書誌事項
- タイトル別名
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- Diagnostics and Simulations of Microplasmas
- マイクロプラズマの計測・解析
- マイクロプラズマ ノ ケイソク カイセキ
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Properties of microplasmas can be characterized not only by their small sizes from mm to μm but also by their relatively high plasma densities which range over 1013 cm-3 in collision dominant atmospheres. These features are due to the high operating pressure generally used, in accordance with Paschen’s law. In addition, the plasma-wall interaction becomes important, given that the charges accumulated on the surface can strongly affect the discharge and plasma behaviors. Diagnostics and simulations should aim to clarify those specific properties of microplasmas. Although there are many difficulties inherent in measurements in such small spaces, several methods have been developed by using optical absorption, fluorescence, and scattering techniques by using various lasers as the light sources. For the simulation, in most cases fluid, particle and Vlasov models can be applied to microplasmas operating at higher pressure. The computer simulations are performed to investigate and produced microplasmas. In this chapter, an overview of our studies on the diagnostics and simulations, mentioned above, will be introduced.
収録刊行物
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- プラズマ・核融合学会誌
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プラズマ・核融合学会誌 80 (10), 835-844, 2004
社団法人 プラズマ・核融合学会
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詳細情報 詳細情報について
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- CRID
- 1390282681488616064
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- NII論文ID
- 110003827864
- 30010643001
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- NII書誌ID
- AN10401672
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- COI
- 1:CAS:528:DC%2BD2cXhtFWqu73E
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- NDL書誌ID
- 7137802
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- ISSN
- 09187928
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- NDL-Digital
- CiNii Articles
- KAKEN
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- 抄録ライセンスフラグ
- 使用不可