プロセスプラズマのモンテカルロシミュレーション(<小特集>モンテカルロシミュレーション)  [in Japanese] Monte Carlo Simulation of Processing Plasma (<Special Features> Monte Carlo Simulation)  [in Japanese]

Abstract

Electrons and ions in plasma have two faces. Their motion is governed by the deterministic equation of motion and their collision is governed by the probability law. That is, the position and velocity of electron or ion is subject to the stochastic process including deterministic law. A method to analyze processing plasmas using the Monte Carlo simulation of the stochastic process is described.

Journal

Journal of the Japan Society for Simulation Technology   [List of Volumes]

Journal of the Japan Society for Simulation Technology 22(4), 239-247, 2003-12-15  [Table of Contents]

Japan Society for Simmulation Technology

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Codes

  • NII Article ID (NAID) :
    110003891040
  • NII NACSIS-CAT ID (NCID) :
    AN00329524
  • Text Lang :
    JPN
  • Article Type :
    特集
  • ISSN :
    02859947
  • NDL Article ID :
    6807552
  • NDL Source Classification :
    ZM13(科学技術--科学技術一般--データ処理・計算機)
  • NDL Call No. :
    Z14-893
  • Databases :
    NDL  NII-ELS