Radical beams produced by laser ablation and their applications

• Nakata Yoshiki

  Department of Electrical Engineering, Kyushu University, Hakozaki, Fukuoka 812

• Sasaki Yoshiyuki

  Department of Electrical Engineering, Kyushu University, Hakozaki, Fukuoka 812

• Okada Tatsuo

  Department of Electrical Engineering, Kyushu University, Hakozaki, Fukuoka 812

• Maeda Mitsuo

  Department of Electrical Engineering, Kyushu University, Hakozaki, Fukuoka 812

書誌事項

タイトル別名

• Radical Beams Produced by Laser Ablation and Their Application.

抄録

A variety of solid targets such as Al₂O₃, Si₃N₄, YBa₂Cu₃O _x and polymers were ablated with an ArF or KrF excimer laser. Laser-induced fluorescence spectroscopy (LIF) was used to detect species ejected from ablated targets and to characterize their kinetic properties. An aluminum radical beam produced from Al₂O₃ was applied to the measurement of the reactive cross section of Al with oxygen gas and to the study of the radical-surface interaction.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 33 (7B), 4316-4319, 1994

  The Japan Society of Applied Physics

キーワード

• laser ablation
• radical beam
• laser-induced fluorescence
• reactive cross section
• radical-surface interaction

詳細情報

• CRID: 1390001206245026560
• NII論文ID: 110003903763
• NII論文ID: 210000035752
• NII論文ID: 130004520362
• NII書誌ID: AA10457675
• DOI: 10.1143/jjap.33.4316
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.33.4316
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.33.4316/pdf
• 本文言語コード: en
• データソース種別:
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• 抄録ライセンスフラグ: 使用不可