Plasma Production Using Energetic Meandering Electrons.

• Yoshida Zensho

  Faculty of Engineering, University of Tokyo, Hongo, Tokyo 113, Japan

• Uchida Taijiro

  ULVAC Japan, Ltd., Chigasaki, Kanagawa 253, Japan

抄録

When an electron is accelerated by an oscillating electric field in an inhomogeneous magnetic field which has a null point, it meanders along a chaotic orbit. The kinetic energy becomes larger than that of regular motion in an off-resonant homogeneous magnetic field. This effect explains the high efficiency of plasma production in the neutral line discharge (NLD).

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 34 (8A), 4213-4216, 1995

  The Japan Society of Applied Physics

キーワード

• plasma production
• meandering particle
• chaos
• magnetic neutral line
• cyclotron resonance

詳細情報

• CRID: 1390001206247073792
• NII論文ID: 210000037683
• NII論文ID: 110003904534
• NII書誌ID: AA10457675
• DOI: 10.1143/jjap.34.4213
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/13474065
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.34.4213
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.34.4213/pdf
• 本文言語コード: en
• データソース種別:
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• 抄録ライセンスフラグ: 使用不可