The Influence of X-Ray Irradiation on Structural Relaxation and Crystallization of Amorpbous Silicon Films

DOI Web Site Web Site Web Site 被引用文献7件 参考文献13件
  • Muto Shunsuke
    Division of Energy Science, Center for Integrated Research in Science and Engineering, Nagoya University, Chikusa–ku, Nagoya 464–8603, Japan
  • Kobayashi Yumiko
    Faculty of Nuclear Engineering, Graduate School of Engineering, Nagoya University, Chikusa–ku, Nagoya 464–8603, Japan
  • Yu Kin Man
    Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA 94720, USA
  • Walukiewicz Wladyslaw
    Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA 94720, USA
  • Echer Charles J.
    Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA 94720, USA
  • Mccormick Scott
    Department of Materials Science and Engineering, University of Illinois, Urbana, IL 61801, USA
  • Abelson John R.
    Department of Materials Science and Engineering, University of Illinois, Urbana, IL 61801, USA

書誌事項

タイトル別名
  • The Influence of X-Ray Irradiation on Structural Relaxation and Crystallization of Amorphous Silicon Films.
  • Influence of X-Ray Irradiation on Struc

この論文をさがす

抄録

The effect of intense X-ray irradiation on the short range structure and the thermal crystallization process in sputter deposited amorphous silicon films has been examined by extended energy-loss fine structure spectroscopy and transmission electron microscopy. The coordination number and the mean square disorder of the first neighbor shell in the amorphous state were increased following X-ray irradiation. The crystallization by post-annealing was delayed, the crystallized particles were dispersed homogeneously throughout the film, and the size of the individual particles was larger than in samples without X-ray irradiation. The above facts suggest that the number of unsaturated bonds is reduced by the X-ray irradiation, which can suppress the atomic diffusion and rearrangement, necessary for the crystallization.

収録刊行物

被引用文献 (7)*注記

もっと見る

参考文献 (13)*注記

もっと見る

キーワード

詳細情報 詳細情報について

問題の指摘

ページトップへ