Design Considerations for Silicon Circular Diaphragm Pressure Sensors

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The design of silicon circular-diaphragm pressure sensors was considered in order to develop highly-accurate pressure sensors. A relatively simple method of stress analysis was proposed. The anisotropy of the elastic properties of silicon, the large deflections of the plates, and elastic deformations of the support structures were taken into account in the stress analysis by the plate theory and the finite element method. Output voltages and their nonlinearities were calculated by applying stress analysis and piezoresistive sensor theories. The calculated results are in close agreement with the experimental results.

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詳細情報

  • CRID
    1572824502224508544
  • NII論文ID
    110003909430
  • NII書誌ID
    AA00690800
  • 本文言語コード
    en
  • データソース種別
    • CiNii Articles

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