Design Considerations for Silicon Circular Diaphragm Pressure Sensors
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- Yasukawa Akio
- Mechanical Engineering Research Laboratory, Hitachi Ltd.
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- Shimada Satoshi
- Hitachi Research Laboratory, Hitachi Ltd.
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- Matsuoka Yoshitaka
- Naka Works, Hitachi Ltd.
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- Kanda Yozo
- Department of Physics, Hamamatsu, University School of Medicine
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抄録
The design of silicon circular-diaphragm pressure sensors was considered in order to develop highly-accurate pressure sensors. A relatively simple method of stress analysis was proposed. The anisotropy of the elastic properties of silicon, the large deflections of the plates, and elastic deformations of the support structures were taken into account in the stress analysis by the plate theory and the finite element method. Output voltages and their nonlinearities were calculated by applying stress analysis and piezoresistive sensor theories. The calculated results are in close agreement with the experimental results.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 21 (7), 1049-1052, 1982
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詳細情報
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- CRID
- 1572824502224508544
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- NII論文ID
- 110003909430
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- NII書誌ID
- AA00690800
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- 本文言語コード
- en
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- データソース種別
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