Pressure-Controlled Wavelength Stabilization of a KrF Excimer Laser with Narrowed Bandwidth : Lithography Technology

    • WANI Koichi
    • Electronics Research Laboratory, Matsushita Electronice Corporation
    • OGATA Yoshiro
    • Electronics Research Laboratory, Matsushita Electronice Corporation,

Abstract

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Journal

JJAP series   [List of Volumes]

JJAP series 3, 22-24, 1989-12-30  [Table of Contents]

The Japan Society of Applied Physics

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Codes

  • NII Article ID (NAID) :
    110003912690
  • NII NACSIS-CAT ID (NCID) :
    AA11020413
  • Text Lang :
    ENG
  • ISSN :
    09149090
  • Databases :
    NII-ELS 

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