Improvement of a Critical Dimension Automatic Measurement Method Using S.E.M : Inspection and Testing

    • MARTIN Herve
    • FRANCE TELECOM:Centre National d'Etudes des Telecommunications 38243 MEYLAN CEDEX FRANCE
    • BURLET Daniel
    • FRANCE TELECOM:Centre National d'Etudes des Telecommunications 38243 MEYLAN CEDEX FRANCE

Abstract

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Journal

JJAP series   [List of Volumes]

JJAP series 3, 360-363, 1989-12-30  [Table of Contents]

The Japan Society of Applied Physics

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Codes

  • NII Article ID (NAID) :
    110003912760
  • NII NACSIS-CAT ID (NCID) :
    AA11020413
  • Text Lang :
    ENG
  • ISSN :
    09149090
  • Databases :
    NII-ELS 

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