A New Ion Counting System Devised for Mass-Selective Detection of Sputtered Neutrals in Laser SNMS

• Ichimura Shingo

  Electrotechnical Laboratory

• Goto Keisuke

  Nagoya Institute of Technology

• Kokubun Kiyohide

  Electrotechnical Laboratory

• Shimizu Hazime

  Electrotechnical Laboratory

• Matsuura Shigeki

  Hamamatsu Photonics, K.K.

抄録

A new ion counting system was devised for time-of-flight mass detection in sputtered neutral mass spectrometry (SNMS), using a pulse laser for postionization. A microchannel plate (MCP) intensifier used as a detector was gated by a retarding grid in front of the MCP for particular masses. High peak-counting ability (exceeding 10¹⁰ counts per second) of the system for ionization with a laser pulse (20–30 ns) was maintained for mass-selective detection. The performance of the new counting system at a high count rate was analyzed, and the detection limit and the accuracy were discussed.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 29 (7), L1209-L1212, 1990

  社団法人応用物理学会

キーワード

• ion counting
• SNMS
• postionization
• laser
• time of flight
• image processing

詳細情報

• CRID: 1572543027196851968
• NII論文ID: 110003923542
• NII書誌ID: AA10650595
• 本文言語コード: en
• データソース種別:
  • CiNii Articles