Fluctuation-Free Electron Emission from Non-Formed Metal-Insulator-Metal (MIM) Cathodes Fabricated by Low Current Anodic Oxidation
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<jats:p> Fluctuation-free electron emission is obtained from MIM (Al-Al<jats:sub>2</jats:sub>O<jats:sub>3</jats:sub>-Au) cathodes. The Al<jats:sub>2</jats:sub>O<jats:sub>3</jats:sub> layer is fabricated by anodic oxidation with a reduced electrolysis current density, i.e., a reduced oxidation rate. The slow oxidation process improves the insulating effect of the Al<jats:sub>2</jats:sub>O<jats:sub>3</jats:sub> layer, and enables the MIM cathodes to operate in the non-formed state. The fluctuation-free emission is reproducible when the diode voltage is cut off instantaneously. With a thin Al<jats:sub>2</jats:sub>O<jats:sub>3</jats:sub> layer, the diode voltage reguired for the cathode operation is reduced to values slightly above the work function of the top electrode. </jats:p>
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 32 (11B), L1695-, 1993-11-01
IOP Publishing
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詳細情報 詳細情報について
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- CRID
- 1360566396795664384
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- NII論文ID
- 110003924294
- 210000034726
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- NII書誌ID
- AA10650595
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- ISSN
- 13474065
- 00214922
- http://id.crossref.org/issn/00214922
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- データソース種別
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- Crossref
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