Change in Scanning Tunneling Microscope (STM) Tip Shape during Nanofabrication

• Naoki Yokoi

• Satoshi Ueda

• Susumu Namba Susumu Namba

• Mikio Takai Mikio Takai

抄録

The influence of voltage pulses upon scanning tunneling microscope (STM) tips during nanofabrication has been studied. The tips were observed by scanning electron microscopy (SEM) before and after application of voltage pulses with various pulse amplitudes, pulse widths and tunneling gap widths, and were found to be damaged by highly concentrated current flowing through the tunneling gap, which resulted in melt and/or evaporation of tips.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 32 (1A), L129-, 1993-01-01

  IOP Publishing

キーワード

• General Physics and Astronomy
• General Engineering

詳細情報

• CRID: 1360003446842195072
• NII論文ID: 110003924378
• NII論文ID: 210000034593
• NII書誌ID: AA10457675
• DOI: 10.1143/jjap.32.l129
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.32.L129
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.32.L129/pdf
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