Nanofabrication of Titanium Surface by Tip-Induced Anodization in Scanning Tunneling Microscopy

• Sugimura Hiroyuki

  Microphotoconversion Project, ERATO Research Development Corporation of Japan

• Uchida Tatsuya

  Microphotoconversion Project, ERATO Research Development Corporation of Japan

• Kitamura Noboru

  Microphotoconversion Project, ERATO Research Development Corporation of Japan

• Masuhara Hiroshi

  Microphotoconversion Project, ERATO Research Development Corporation of Japan

抄録

A titanium (Ti) surface was arbitrarily oxidized by a scanning tunneling microscope (STM). Oxidation of the Ti surface was induced by scanning an STM tip with the sample (Ti) bias of more than +3 V, and a dot or line pattern of oxide was fabricated on Ti with the spatial resolution of 70 nm. The results were discussed in terms of tip-induced anodization of Ti due to water adsorbed on the surface.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 32 (4), L553-L555, 1993

  社団法人応用物理学会

キーワード

• scanning tunneling microscopy
• surface modification
• titanium
• titanium oxide
• anodization

詳細情報

• CRID: 1570854177337026048
• NII論文ID: 110003924503
• NII書誌ID: AA10650595
• 本文言語コード: en
• データソース種別:
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