Fabrication of LiNbO₃ Phase Gratings by Excimer Laser Ablation through a Silica Phase Mask

• Luo G. P.

  National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, P.R. China

• Lu Y. Q.

  National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, P.R. China

• Zhu Y. Y.

  National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, P.R. China

• Lu Y. L.

  National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, P.R. China

• Guo X. L.

  National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, P.R. China

• Ge C. Z.

  National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, P.R. China

• Liu Z. G.

  National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, P.R. China

• Ming N. B.

  CCAST (World Laboratory), P.O.Box 8370, Beijing 100080, P.R. China National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, P.R. China

• Wu J. W.

  National Laboratory of Molecular & Biomolecular Electronics, Southeast University, Nanjing 210096, P.R.China

• Lu Z. H.

  National Laboratory of Molecular & Biomolecular Electronics, Southeast University, Nanjing 210096, P.R.China

書誌事項

タイトル別名

• Fabrication of LiNbO3 Phase Gratings by Excimer Laser Ablation through a Silica Phase Mask.
• Fabrication of LiNbO3 Phase Gratings by

抄録

Lithium niobate ( LiNbO₃) wafer phase gratings were fabricated by excimer pulsed ablation through a transmission silica phase mask grating. Surface morphology of the LiNbO₃ phase gratings was studied using an atomic force microscope as well as an optical microscope. Crystal structures and the diffraction patterns of the gratings were characterized by X-ray diffraction and using a He-Ne laser beam, respectively.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 35 (12A), L1593-L1595, 1996

  The Japan Society of Applied Physics

キーワード

• LiNbO<SUB> 3</SUB>
• phase grating
• excimer laser
• ablation
• phase mask

詳細情報

• CRID: 1390282681226014080
• NII論文ID: 110003924899
• NII論文ID: 210000040385
• NII書誌ID: AA10650595
• DOI: 10.1143/jjap.35.l1593
• ISSN: 13474065
• ISSN: 00214922
• NDL書誌ID: 4098790
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4098790
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.35.L1593
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.35.L1593/pdf
• 本文言語コード: en
• データソース種別:
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  • NDL
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  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可