Thick GaN Epitaxial Growth with Low Dislocation Density by Hydride Vapor Phase Epitaxy.
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- Usui Akira
- Opto–electronics Research Laboratories, NEC Corporation, 34 Miyukigaoka, Tsukuba, Ibaraki 305, Japan
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- Sunakawa Haruo
- Opto–electronics Research Laboratories, NEC Corporation, 34 Miyukigaoka, Tsukuba, Ibaraki 305, Japan
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- Sakai Akira
- Fundamental Research Laboratories, NEC Corporation, 34 Miyukigaoka, Tsukuba, Ibaraki 305, Japan
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- Yamaguchi A. Atsushi
- Fundamental Research Laboratories, NEC Corporation, 34 Miyukigaoka, Tsukuba, Ibaraki 305, Japan
書誌事項
- タイトル別名
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- Thick GaN Epitaxial Growth with Low Dis
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抄録
Thick GaN layers were grown by hydride vapor phase epitaxy (HVPE) with the aim of using these layers as a homoepitaxial substrate to improve device quality of laser diodes or light emitting diodes. HVPE is very useful for thick layer growth since the growth rate can reach from several ten up to one hundred micron per hour. In this experiment, the growth began as selective growth through openings formed in a SiO2 mask. Facets consisting of {1\=101} planes were formed in the early stage and a continuous film developed from the coalescence of these facets on the SiO2 mask. As a result, GaN layers with a dislocation density as low as 6× 107 cm-2 were grown on 2-inch-diameter sapphire wafers. These GaN layers were crack-free and had mirror-like surface.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 36 (7B), L899-L902, 1997
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390001206249398400
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- NII論文ID
- 210000042706
- 110003925696
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- NII書誌ID
- AA10650595
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- COI
- 1:CAS:528:DyaK2sXkvFCit74%3D
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- ISSN
- 13474065
- 00214922
- http://id.crossref.org/issn/00214922
- http://id.crossref.org/issn/13474065
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- NDL書誌ID
- 4270323
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可