Precise Laser Ultrasonic Technique with Application to Silicon Velocity Measurements

• Matsuda Youichi

  National Research Laboratory of Metrology, 1-1-4 Umezono, Tsukuba, Ibaraki 305-8563, Japan

• Nakano Hidetoshi

  National Research Laboratory of Metrology, 1-1-4 Umezono, Tsukuba, Ibaraki 305-8563, Japan

• Nagai Satoshi

  National Research Laboratory of Metrology, 1-1-4 Umezono, Tsukuba, Ibaraki 305-8563, Japan

抄録

A technique based on high-frequency laser ultrasound has been developed for sound velocity measurements. Precise velocity measurements were realized by employing a 140 MHz ultrasonic rf burst generated by a mode-locked laser in combination with a pulse-echo-overlap method. As an illustrative application of this technique, longitudinal and shear velocities in silicon single crystals at 25°C were measured with precision better than 50 ppm and 110 ppm, respectively. Diffraction effects were calculated and verified experimentally. Furthermore, longitudinal velocities in the (110) direction were successfully measured up to 800°C.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 39 (1AB), L59-L61, 2000

  The Japan Society of Applied Physics

キーワード

• sound velocity
• laser ultrasound
• pulse echo overlap
• high frequency ultrasound
• silicon single crystal
• high temperature

詳細情報

• CRID: 1390282681247403520
• NII論文ID: 110003928559
• NII論文ID: 130004526960
• NII論文ID: 210000048543
• NII書誌ID: AA10650595
• DOI: 10.1143/jjap.39.l59
• ISSN: 13474065
• ISSN: 00214922
• NDL書誌ID: 4975119
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4975119
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.39.L59
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.39.L59/pdf
• 本文言語コード: en
• データソース種別:
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  • NDL
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• 抄録ライセンスフラグ: 使用不可