Magnification of Transportation Range Using Non-Contact Acoustic Levitation by Connecting Vibrating Plates.

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  • Hashimoto Yoshiki
    Kaijo Corporation, 3–1–5, Sakae, Hamura 205, Japan
  • Koike Yoshikazu
    Precision and Intelligent Laboratory, Tokyo Institute of Technology, 4259, Nagatsuta, Midori–ku, Yokohama 226, Japan
  • Ueha Sadayuki
    Precision and Intelligent Laboratory, Tokyo Institute of Technology, 4259, Nagatsuta, Midori–ku, Yokohama 226, Japan

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  • Magnification of Transportation Range U

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The authors have identified a new acoustic phenomenon by which an object weighing several kilograms and having a planar shape can be levitated by radiation pressure above a set of vibrating plates. We propose to use this phenomenon for levitation and transportation systems for moving silicon wafers and liquid crystal devices (LCDs). In this report, the authors describe a method that increases the capability of the device to carry large objects by placing two vibrating plates in parallel and enlarges the transportation range by placing the vibrating plates in a series. The results show that a large object such as an LCD 250 mm square can be transported long distances limited only by the number of plates placed in series.

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