Piezoelectric Actuator of LiNbO3 with an Integrated Displacement Sensor.
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- Wakatsuki Noboru
- Department of Electronics and materials, Faculty of Science and Engineering, Ishinomaki–Senshu University, Ishinomaki 986–8580, Japan
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- Yokoyama Hideki
- Department of Electronics and materials, Faculty of Science and Engineering, Ishinomaki–Senshu University, Ishinomaki 986–8580, Japan
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- Kudo Subaru
- Department of Electronics and materials, Faculty of Science and Engineering, Ishinomaki–Senshu University, Ishinomaki 986–8580, Japan
Bibliographic Information
- Other Title
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- Piezoelectric Actuator of LiNbO<sub>3</sub> with an Integrated Displacement Sensor
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Abstract
We proposed a new actuator with an integrated displacement sensor. We examined the bimorph actuator using an oppositely-polarized LiNbO3 plate. The actuator shows a spurious transient response to driving step voltage due to two resonances (fundamental mode: 278 Hz, and secondary mode: 1720 Hz). We obtained an equivalent circuit model using the input impedance characteristics of the driving electrode and the sensor electrode. We could analyze the transient response of the actuator using the equivalent circuit model. Our simulation of the feedback circuit with an equivalent model showed the possibility of suppressing the ringing of the fundamental mechanical resonant mode.
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 37 (5B), 2970-2973, 1998
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390282681224938240
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- NII Article ID
- 210000043193
- 110003947397
- 130004525092
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- NII Book ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL BIB ID
- 4640584
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed