Micropatterning of Ferroelectric Bi4Ti3O12 Using Electron-Beam-Induced Reaction of Metal Octylate Films.

• Okamura Soichiro

  Department of Electronics and Computer Science, Faculty of Science and Engineering, Science University of Tokyo in Yamaguchi, 1–1–1 Daigaku–dori, Onoda, Yamaguchi 756, Japan

• Yagi Yukie

  Department of Electronics and Computer Science, Faculty of Science and Engineering, Science University of Tokyo in Yamaguchi, 1–1–1 Daigaku–dori, Onoda, Yamaguchi 756, Japan

• Ando Shizutoshi

  Department of Applied Physics, Faculty of Science, Science University of Tokyo, 1–3 Kagurazaka, Shinjuku–ku, Tokyo 162, Japan

• Tsukamoto Takeyo

  Department of Applied Physics, Faculty of Science, Science University of Tokyo, 1–3 Kagurazaka, Shinjuku–ku, Tokyo 162, Japan

• Mori Katsumi

  Department of Electronics and Computer Science, Faculty of Science and Engineering, Science University of Tokyo in Yamaguchi, 1–1–1 Daigaku–dori, Onoda, Yamaguchi 756, Japan

Bibliographic Information

Other Title

• Micropatterning of Ferroelectric Bi₄Ti₃O₁₂ Using Electron-Beam-Induced Reaction of Metal Octylate Films

Abstract

Micropatterning of ferroelectric Bi₄Ti₃O₁₂ was carried out using an electron-beam-induced reaction of metal octylate films. Bismuth and titanium octylates were used as starting materials. Precursor solutions were prepared by mixing the octylates at a Bi:Ti molar ratio of 5.2:3.0 and diluting with acetone. The metal octylates exhibited negative exposure characteristics upon electron beam irradiation: a sensitivity of 1.5 × 10^-4 C/cm² and a gamma value of 2. Precursor micropatterns were formed by electron beam irradiation on the spin-coated octylate films and successive development with toluene. The precursor micropatterns were calcined at 450^°C for 10 min and sintered at 800^°C for 30 min in air. A 65 × 80 µm² precursor micropattern was crystallized into the single-phase of Bi₄Ti₃O₁₂ by the heat treatment. Crystallized square micropatterns 1 µm in size consisted of small platelike crystals.

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 35 (12B), 6579-6583, 1996

  The Japan Society of Applied Physics

Keywords

• patterning
• electron beam
• beam-induced reaction
• metal octylate
• ferroelectric
• Bi<SUB> 4</SUB>Ti<SUB> 3</SUB>O<SUB>12</SUB>

Details

• CRID: 1390282681226962304
• NII Article ID: 210000040095
• NII Article ID: 110003955323
• NII Book ID: AA10457675
• DOI: 10.1143/jjap.35.6579
• ISSN: 13474065
• ISSN: 00214922
• NDL BIB ID: 4639038
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4639038
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.35.6579
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.35.6579/pdf
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed