Surface Acoustic Wave Semiconductor Coupled Devices Employing Epitaxial Lift-Off Films.
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- Hohkawa Kohji
- Department of Electronic & Electrical Engineering, Kanagawa Institute of Technology, 1030 Shimo–Ogino, Atsugi, Kanagawa 243–02, Japan
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- Suzuki Hiroji
- Advanced Technology Research Laboratory, Meidensha Corporation, 1–17, Ohsaki 2–chome, Shinagawa, Tokyo 141, Japan
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- Komine Kenji
- Advanced Technology Research Laboratory, Meidensha Corporation, 1–17, Ohsaki 2–chome, Shinagawa, Tokyo 141, Japan
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- Huang Qixin
- Department of Electronic & Electrical Engineering, Kanagawa Institute of Technology, 1030 Shimo–Ogino, Atsugi, Kanagawa 243–02, Japan
書誌事項
- タイトル別名
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- Surface Acoustic Wave Semiconductor Cou
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抄録
We present high-performance surface acoustic wave semiconductor coupled devices in which highly functional compound semiconductor devices and highly efficient surface acoustic wave devices are monolithically integrated on the same substrate using epitaxial lift-off films. We investigated the optimal conditions for lift-off and bonding processes and succeeded in fabricating a quasi-monolithic structure without any damage in semiconductor films. We also investigated basic integrated circuit fabrication processes such as patterning and etching of the quasi-monolithic substrate. The bonded film is stable and rugged enough against these processes and the substrate can be handled as a monolithic substrate. Based on our experimental results, we confirmed that fabricating high performance functional devices is feasible.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 35 (5B), 3015-3019, 1996
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390282681224440960
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- NII論文ID
- 110003955445
- 210000039302
- 130004522642
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- NII書誌ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL書誌ID
- 4059721
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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