Tip-Scanning Dynamic Force Microscope Using Piezoelectric Cantilever for Full Wafer Inspection.

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  • Chu Jiaru
    Mechanical Engineering Laboratory, Agency of Industrial Science and Technology, Ministry of International Trade and Industry, 1–2 Namiki, Tsukuba, Ibaraki 305–0044, Japan
  • Maeda Ryutaro
    Mechanical Engineering Laboratory, Agency of Industrial Science and Technology, Ministry of International Trade and Industry, 1–2 Namiki, Tsukuba, Ibaraki 305–0044, Japan
  • Itoh Toshihiro
    Research Center for Advanced Science and Technology, The University of Tokyo, Komaba 4–6–1, Meguro–ku, Tokyo 153–0041, Japan
  • Suga Tadatomo
    Research Center for Advanced Science and Technology, The University of Tokyo, Komaba 4–6–1, Meguro–ku, Tokyo 153–0041, Japan

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In this study we demonstrate the structure of a new dynamic force microscope (DFM) compatible with full wafer inspection. It is a tip-scanning-type DFM based on a piezoelectric micro-cantilever integrated with a conical tip as a force sensor. The piezoelectric micro-force sensor is mounted on top of a tube scanner. The sample is put on the sample stage facing the tip. The novel DFM has proven to be stable for probing the surface of full wafers with a vertical resolution of about 0.12 nm. The design and performance of the novel tip scanning DFM is explained in detail in this report.

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