Preparation of Thermochromic VO<sub>2</sub>Thin Films on Fused Silica and Soda-lime Glass by RF Magnetron Sputtering

DOI Web Site 参考文献9件
  • Wang Xuejin
    Institute of Physics, Chinese Academy of Science, P. O. Box 603, 100080, Beijing, China
  • Xu Jinjie
    Institute of Physics, Chinese Academy of Science, P. O. Box 603, 100080, Beijing, China
  • Fei Yunjie
    Institute of Physics, Chinese Academy of Science, P. O. Box 603, 100080, Beijing, China
  • Li Dehua
    Institute of Physics, Chinese Academy of Science, P. O. Box 603, 100080, Beijing, China
  • Li Tiejin
    Institute of Physics, Chinese Academy of Science, P. O. Box 603, 100080, Beijing, China
  • Nie Yuxin
    Institute of Physics, Chinese Academy of Science, P. O. Box 603, 100080, Beijing, China
  • Feng Kean
    Institute of Physics, Chinese Academy of Science, P. O. Box 603, 100080, Beijing, China
  • Wu Naijuan
    Space Vacuum Epitaxy Center, University of Houston, Houston, TX 77204-5507, USA

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タイトル別名
  • Preparation of Thermochromic VO2 Thin Films on Fused Silica and Soda-lime Glass by RF Magnetron Sputtering.

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The VO2 thin films were deposited on fused silica and soda-lime glass by RF magnetron sputtering and characterized by X-ray diffraction (XRD) and BIORAD FTS 6000 spectrometer. The influence of stress on the phase transition temperature and shape was also discussed.

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