Manufacturing Process of Flat Display(<Special Issue>Micro Mechanical Engineering)

A large size display for entertainment, internet, PC and other information instruments is key tool for coming IT revolutionary era, so that the large size display must be characterized by very low electric power consumption and human friendly performance without tiring user's eyes. Thus, liquid crystal (LC) and electroluminescence (EL) displays are candidates for this target. High quality poly-silicon TFT is essentially required even for LCD displays instead current amorphous Si TFT, because very large current drivability is necessary for TFT due to the increase of LCD cell capacitor with an increase of display size up to 50 inches and beyond. The key issue for this target is a creation of very low temperature poly-Si TFT manufacturing technology without excimer laser annealing and very low cost manufacturing which is characterized by very simplified display structures and very simplified manufacturing steps based on very drastic progress of various relating materials and components such as backlights, polarizer, color filter, and etc.