Micro Industry Equipments Micro Industry Equipments(<Special Issue>Micro Mechanical Engineering)

Abstract

Advanced states of art of MEMS (Micro Electro Mechanical Systems) technology have been applied to micro industry equipments. These are electrostatically levitated ring rotor gyroscope and micro energy source for self moving machines like robots, maintenance systems used in narrow spaces, components for multi-column electron beam lithography and multi-probe data storage, micro gas control systems, micro/nano mold, micro contactor and thermal RF relay for LSI testing and nano-instruments which performs high sensitivity and spatial resolution.

Journal

JSME international journal. Ser. B, Fluids and thermal engineering   [List of Volumes]

JSME international journal. Ser. B, Fluids and thermal engineering 47(3), 429-438, 2004-08-15  [Table of Contents]

The Japan Society of Mechanical Engineers

References:  31

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Codes

  • NII Article ID (NAID) :
    110004820135
  • NII NACSIS-CAT ID (NCID) :
    AA10888815
  • Text Lang :
    ENG
  • Article Type :
    ART
  • ISSN :
    13408054
  • NDL Article ID :
    7041080
  • NDL Source Classification :
    ZN11(科学技術--機械工学・工業)
  • NDL Call No. :
    Z53-Y271
  • DOI :
    10.1299/jsmeb.47.429
  • Databases :
    CJP  NDL  NII-ELS  IR  J-STAGE