Micro Electro Mechanical Devices for Fiber Optic Telecommunication(<Special Issue>Micro Mechanical Engineering)

This paper overviews the MEMS applications to micro optics and focuses onto recent development in the field of fiber optic telecommunication such as optical crossconnects, variable optical attenuators, and general spatial light modulators using microelectromechanical scanning mirrors or lenses. We also discuss common topics in MEMS that await technical solutions such as lower driving voltage, higher mechanical tolerance and better electromechanical stability. As a next target, we present a new perspective to nanophotonic approach of MEMS where photonic crystal waveguides are integrated with micro/nano mechanical devices to realize highly integrated photonic circuits.