2833 パラレルメカニズムを用いた高速・高精度3次元座標計測システム : 第18報,フレーム変形補正装置の改良(S62 パラレルメカニズムとその応用)

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  • 2833 Coordinate Measuring Machine using Parallel Mechanism (18th report) : Improvement of Compensation Device for Machine Frame Deformations

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This paper describes a compensation method for elastic and thermal deformations of the machine frame supporting the mechanism of the parallel kinematic machine (PKM). Three displacement sensors with Super-Invar rods measure distance variations among three joint supports connecting the mechanism. Thus, the base platform's dimensions of the PKM are calculated from these measured distance variations. Moreover, six other displacement sensors with rods measure the distance variations between the machine's surface plate and the three joint supports. Therefore, the forward kinematics of the hexapod mechanism calculates displacement and attitude variations of the base platform during operation from these measured displacements. Consequently, coordinates of the PKM's end effector can be compensated. In the previous reports, this device was installed in an experimental coordinate measuring machine using a three-degree of freedom parallel manipulator. This report describes an improvement of the device. Coordinate measurements using a master ball mounted.on the surface plate showed that improved device decreased the influences of temperature fluctuation and external force on machine accuracy.

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