書誌事項
- タイトル別名
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- Study on Spatial Frequency Domain 2-point Method (1st Report)
- クウカン シュウハスウ リョウイキ 2テンホウ ニ カンスル ケンキュウ ダイ 1ポウ 2クミ ノ 2テンホウ オ クミアワセル バアイ ノ ケイトウ ゴサ ノ ホセイ
- -Calibration of Systematic Error in Case of Combining Two Sets of 2-point Method-
- —2組の2点法を組合わせる場合の系統誤差の補正—
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抄録
The multi-probe scanning method has been researched widely for evaluating the profile of large size ultra precision specimens. Several data processing methods, such as inclination method, integration method and combination method, etc. have been developed using two or three-sensor measurement systems. In this paper, the spatial frequency domain 2-point method, which combines two data sets of 2-point method with different sensor intervals, is discussed. Firstly, the algorithm of the two sets of 2-point method is introduced without considering the systematic and random error. Then, the influence of the systematic error is analyzed and an accurate software calibration method of the systematic error is proposed in the presence of the systematic and random error simultaneously. The uncertainty of evaluated profile is also estimated quantitatively after calibration. Although the uncertainty is introduced by both the random error and the systematic error, it is shown that its result is only decided by the magnitude of the random error. Simulations are performed to confirm the theory analysis finally.
収録刊行物
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- 精密工学会誌
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精密工学会誌 73 (6), 653-658, 2007
公益社団法人 精密工学会
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詳細情報 詳細情報について
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- CRID
- 1390001204797912064
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- NII論文ID
- 110006278973
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- NII書誌ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
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- NDL書誌ID
- 8855685
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
- 使用不可