Droplet-Free Thin Films Prepared by Pulsed Laser Deposition Using a Vane Velocity Filter.

• Yoshitake Tsuyoshi

  Department of Applied Science for Electronics and Materials, Kyushu University, Kasuga, Fukuoka 816-8580, Japan

• Shiraishi Gousuke

  Department of Applied Science for Electronics and Materials, Kyushu University, Kasuga, Fukuoka 816-8580, Japan

• Nagayama Kunihito

  Department of Aeronautics and Astronautics, Kyushu University, Hakozaki, Fukuoka 812-8581, Japan

抄録

Pulsed laser deposition is an effective method of fabricating a large variety of thin films. However, it has a serious disadvantage in that many droplets with diameters of 1-10 μm are deposited together with the ablation species. In order to eliminate droplets, a velocity filter containing many vanes was adopted, by means of which the number of droplets decreased markedly. The velocity distribution of the droplets was obtained for various droplet sizes. The maximum velocity of the droplets is 65 m/s. This shows that it is possible to eliminate the droplets completely at a suitable cutoff velocity of the filter.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 41 (2A), 836-837, 2002

  The Japan Society of Applied Physics

キーワード

• droplet
• PLD
• ablation
• FeSi<FONT SIZE="-1"><SUB>2</SUB></FONT>
• filter

詳細情報

• CRID: 1390001206255479680
• NII論文ID: 210000052461
• NII論文ID: 110006340844
• NII書誌ID: AA10457675
• DOI: 10.1143/jjap.41.836
• ISSN: 13474065
• ISSN: 00214922
• Web Site: http://stacks.iop.org/1347-4065/41/i=2R/a=836/pdf
• 本文言語コード: en
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