Micro Electro Mechanical Systems(MEMS) Micr-Switches for Use in DC, RF, and Optical Applications(Review Paper)

• Suzuki Kenichiro

  Functional Devices Research Laboratories, NEC Corporation, 34 Miyukigaoka, Tsukuba, Ibaraki 305-8501, Japan

書誌事項

タイトル別名

• Micro Electro Mechanical Systems (MEMS) Micro-Switches for Use in DC, RF, and Optical Applications.

抄録

Micromachined micro-switches have stimulated the development of the core infrastructure technology for the next generation communication systems because of their superior performance. They are fabricated by similar silicon micromachined processes, but the switch structure and its characteristics depend on each application. Micro electro mechanical systems (MEMS) technology has been applied to micro relays, RF switches, and optical switches; as a result, optical and mechanical performance has been improved.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 41 (6B), 4335-4339, 2002

  The Japan Society of Applied Physics

キーワード

• MEMS
• micro-switch
• information technology
• micro-relay
• RF switch
• optical switch

詳細情報

• CRID: 1390282681231124992
• NII論文ID: 110006341513
• NII論文ID: 210000051683
• NII論文ID: 130004529841
• NII書誌ID: AA10457675
• DOI: 10.1143/jjap.41.4335
• ISSN: 13474065
• ISSN: 00214922
• NDL書誌ID: 6215853
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I6215853
• Web Site: http://stacks.iop.org/1347-4065/41/i=6S/a=4335/pdf
• 本文言語コード: en
• データソース種別:
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• 抄録ライセンスフラグ: 使用不可