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Abstract
Diamond particle dispersion type functional fluid impressed high AC voltage forms the rotational flow structure under the high electric intensity and the low frequency conditions. This study investigated fundamental flow characteristics of the rotational flow structure to improve a new polishing technique for nano-microscopic processing technology and to develop novel micro devices. This structure consisted of rotational flows generated with positive and negative acceleration flows at even interval in plane. The acceleration flow was induced near the electrode by alternate electric field and it was drastically developed and arrived at the opposite side of the electrode. This flow had a certain delay from electric field excitation of the rectangular AC wave and this delay occurred independently of the impressed frequency of the electric field.
Journal
- 年次大会講演論文集 : JSME annual meeting [List of Volumes]
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年次大会講演論文集 : JSME annual meeting 2006(2), 23-24, 2006-09-15 [Table of Contents]
The Japan Society of Mechanical Engineers