2615 電気浸透流を利用したマイクロポンプの開発(S44-2 マイクロ・ナノ流れの実験・計測,S44 マイクロ・ナノフルイディクス) 2615 Development of an Electroosmotic flow driven liquid micro-pump

We developed an Electroosmotic flow (EOF) driven liquid micro-pump. The dimension of micro-pump channels are 15, 25, 50μm height, and 500, 1000, 2000μm width. Head-volume characteristics of the present micro-pumps are measured. There are linear relationship between total head and flow rate. The maximum flow rate is 1.0μl/min at 0Pa, whereas the maximum total head is 500Pa at 0μl/min for water. Dimensional analysis on the measured pump characteristics is carried out for the EOF micro-pump design.