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抄録
A hot film anemometry is developed for a flow control of a Y-shaped valveless micro-pump. The nickel thin film is deposited on a polyimide film as a heater and a temperature sensor of the anemometry. The fabricated anemometry is calibrated by using an infusion pump from 0 to 1.0ml/min flow rates. The flow rate of the valveless micro-pump is measured by the calibrated anemometry, and the measured flow rate agrees well with high speed camera measurements. The results show that the developed hot film is available for flow rate measurements of the Y-shaped valveless micro-pump, and it can be useful for the flow control.
