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In recent years, research and development of the micro-fluidic systems have been activated in the field of chemical technology and biotechnology. Micro-fluidic systems are realized by micromachine technology and MEMS technology. Micro pump is an essential element for miniaturization of chemical analysis reaction systems. The aim of this research is development of a micro screw pump which will be incorporated in micro-fluidic systems. This pump aims to control minute amounts of liquids. This pump is 16mm in diameter and 41mm in length. The features of this pump are (1) the pump has built-in actuator, (2) liquid can be flowed in bidiretion by the pump, (3) the pump is nonpulsatile pump. In this paper, the structure and the characteristics of this pump are shown.
