5709 光てこAFMのダイナミック計測における補正手法の研究 : 先端付加ばねの影響(J21-2 マイクロナノ理工学(2),J21 マイクロナノ理工学)  [in Japanese] 5709 Data Correction Method for Dynamic Measurements by Optical Lever AFM : Effect of Added Spring at the Cantilever End  [in Japanese]

Free and forced vibrations of a cantilever with a spring at the tip used in an atomic force microscope (AFM) have been analysed and vibration amplitudes of the cantilever end that will be measured by using the optical lever method have been predicted theoretically. It was found that the predicted amplitude includes errors and correction of the amplitude depending on the vibration freqency is necessary. The correction factor has been newly derived. These results are useful for ultrahigh accuracy measurements, especially dynamic measurements, using the AFM.