416 マイクロ水流を用いた電気めっきによるマイクロチューブの製作(第2報)(OS-2 放電加工)  [in Japanese] 416 Fabrication of Microtube by Electroplating combined with Micro Fluidics  [in Japanese]

In this article, the new fabrication method of metal microtubes structure is proposed. The method consists of the combination of simple electroplating method and micro fluidics is used for the fabrication of the metal microtubes on a silicon wafer. This method makes it possible to fabricate metal microtubes array in high through-put, low cost way.