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- 沼津 匡俊
- 筑波大学大学院システム情報工学研究科
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- DICK Andrew J.
- Department of Mechanical Engineering and Material Science, Rice University
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- 藪野 浩司
- 筑波大学大学院システム情報工学研究科
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- 黒田 雅治
- 産業技術総合研究所先進製造プロセス研究部門
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- BALACHANDRAN Balakumar
- Department of Mechanical Engineering, University of Maryland
書誌事項
- タイトル別名
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- Control of an Impacted Cantilever toward Application of an Atomic Force Microscope in Tapping Mode
- タッピング モード ゲンシカンリョク ケンビキョウ エノ オウヨウ ニ ムケタ カンチレバー ノ ショウトツ シンドウ ト セイギョ
この論文をさがす
抄録
Toward the application to the tapping mode AFM (Atomic Force Microscope), we propose a new control method to keep the state of a soft impact between an object surface and the tip of a cantilever whose supporting point is periodically and laterally excited. In the practical usage of AFM, the surface of the object is scanned by the excited cantilever. Depending on the profile of the surface, the distance between the surface and the center of the excitation is varied and then, the state of the contact is changed. To keep the state of contact, the center of the excitation is automatically shifted in AFM. As a result, we can know the profile of the object from the shift of the center while scanning. By the way, it is known that various bifurcations of the responses of the beam occur according to impact conditions and variation of the excitation frequency. In our previous study, we indicated theoretically and experimentally that when the excitation frequency N is set to 2.5 times the first natural frequency ω1 of the cantilever, i.e., N=2.5ω1, the contact produces the frequency component of the 1.25 time the first natural frequency in the cantilever response, i.e., 1.25ω1. In this paper, by using this phenomenon, we propose a control method to shift the center of the excitation according to the profile of the object surface, keeping soft contact. For this purpose, a real-time signal processing method is suggested to determine the magnitude of the targetted frequency component. Also, a servo system is designed to periodically excite and to control the center of the excitation precisely. Finally, validity of the proposed control method is experimentally confirmed by using a macro-beam.
収録刊行物
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- 日本機械学会論文集C編
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日本機械学会論文集C編 74 (742), 1409-1415, 2008
一般社団法人 日本機械学会
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詳細情報 詳細情報について
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- CRID
- 1390282681364379776
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- NII論文ID
- 130004236693
- 110006793576
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- NII書誌ID
- AN00187463
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- ISSN
- 18848354
- 03875024
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- NDL書誌ID
- 9560388
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
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- 使用不可