マシニングセンタ型ナノ加工・計測システムの開発に関する研究

• 稲垣 清紀

  立山マシン(株)

• 森田 昇

  富山大学工学部

• 芦田 極

  (独)産業技術総合研究所

• 斉藤 潤二

  立山マシン(株)

書誌事項

タイトル別名

• Study for Development of Nano-Machining and Measurement System of Machining Center Type
• マシニング センタガタ ナノ カコウ ケイソク システム ノ カイハツ ニ カンスル ケンキュウ

抄録

A small precision nanomachining and measurement system was developed with a targeted machining resolution on the order of scales ranging from submicrons to several nanometers. The system was comprised of two machining functions, scratch machining and milling, and one measurement function. The scratch machining function was based on a frictional force microscope mechanism with a closed-loop numerical control (NC) to control the depth of the cut. A stiff cantilever was used for the scratch-machining function to permit nanomachining of hard and brittle materials such as silicon. The milling function used an original miniature tool that had a very small diamond mounted on it that permitted micromachining. The measurement function incorporated into this system used the same mechanism as the scratch-machining function, and provided a degree of precision almost equal to that of atomic force microscopy. After constructing this system, we performed various machining tests with it to confirm that the integrated NC closed-loop control function performed correctly.

収録刊行物

• 精密工学会誌

  精密工学会誌 74 (11), 1176-1181, 2008

  公益社団法人 精密工学会

キーワード

• diamond AFM cantilever
• diamond array tool
• precision machining
• nano machining
• frictional force microscope
• micro milling

詳細情報

• CRID: 1390282679773108096
• NII論文ID: 110006990556
• NII書誌ID: AN1003250X
• DOI: 10.2493/jjspe.74.1176
• ISSN: 1882675X
• ISSN: 09120289
• NDL書誌ID: 9710903
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I9710903
• Web Site: https://www.jstage.jst.go.jp/article/jjspe/74/11/74_11_1176/_pdf
• 本文言語コード: ja
• データソース種別:
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  • NDL
  • Crossref
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  • KAKEN
• 抄録ライセンスフラグ: 使用不可